Developing a Simple Scanning Probe System for Soft X-ray Spectroscopy with a Nano-focusing Mirror

• Published in: E-journal of surface science and nanotechnology Vol. 21; no. 3
• Main Authors: Ando, Hiroshi, Horio, Masafumi, Takeo, Yoko, Niibe, Masahito, Wada, Tetsuya, Ando, Yasunobu, Kondo, Takahiro, Kimura, Takashi, Matsuda, Iwao
• Format: Journal Article
• Language: English; Japanese
• Published: Tokyo Japan Science and Technology Agency 01.01.2023
• Subjects: Fine structure; Free electron lasers; Ion beams; Soft X ray spectroscopy; Soft x rays; Synchrotron radiation; Synchrotrons
• ISSN: 1348-0391
• DOI: 10.1380/ejssnt.2023-020

We developed a compact system for the spectroscopic mapping of a microstructure with a nano-focused beam at a soft X-ray beamline of synchrotron radiation. The experimental setup comprises a Wolter mirror and sample that are arranged with two mounting stages. The Wolter mirror is aligned with three degrees of freedom, and the sample with two degrees. The system generates a beam with an 800-nm spot and maps out a chemical distribution of non-uniform material through near-edge X-ray fine structure spectroscopy. The design and actual system are suited to experiments conducted with a nano-focused X-ray beam at beamlines of synchrotron radiation or an X-ray free-electron laser. Additionally, this technical note presents guidelines for actual experiments.