A Computationally Efficient Model for Analyzing an Electro-Statically Driven MEMS Device Embedded in a Dielectric Fluid - Quan Qi (ICEPT 2006 proceedings : 7th International Conference on Electronics Packaging Technology : Shanghai, China, August 26 to 29, 2006, 2006)
Keywords: Computational modeling; Damping; Deformable models; Dielectric devices; Differential equations; Embedded computing; Fluid dynamics; Lubrication; Microelectromechanical devices; Voltage