Development of deformable mirror for spherical aberration compensation

By using conventional MEMS processes, we have successfully developed a high accuracy and easily controllable deformable mirror with simple structure. Furthermore, we have obtained a reflective film of low stress which was a challenge.

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Bibliographic Details
Published in2009 Optical Data Storage Topical Meeting pp. 90 - 92
Main Authors Aoki, S., Yamada, M., Yamagami, T.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.05.2009
Subjects
Micromechanical devices
Mirrors
Optical films
Optical surface waves
Reflectivity
Semiconductor films
Shape
Silicon
Stress
Testing
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Summary:By using conventional MEMS processes, we have successfully developed a high accuracy and easily controllable deformable mirror with simple structure. Furthermore, we have obtained a reflective film of low stress which was a challenge.
ISBN:1424433428
9781424433421
DOI:10.1109/ODS.2009.5031764