The Implementation of FEM and RBF Neural Network in EIT
With the rapid development of electronic technology, semiconductor section resistivity measurement is receiving increasing attention. This paper applies electrical impedance tomography (EIT) technology to semiconductor resistivity measurements. FEM is applied to solve the EIT forward problem. Mathem...
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Published in | 2009 Second International Conference on Intelligent Networks and Intelligent Systems pp. 66 - 69 |
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Main Authors | , , , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
01.11.2009
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Subjects | |
Online Access | Get full text |
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