An information-theory and Virtual Metrology-based approach to Run-to-Run semiconductor manufacturing control
Virtual Metrology (VM) and soft sensing modules have become popular in the past years and are now widely adopted in semiconductor plants. Nevertheless, few scientific works have so far investigated interactions between VM and Run-to-Run (R2R), the most common control approach in the field. In this p...
Saved in:
Published in | 2012 IEEE International Conference on Automation Science and Engineering (CASE) pp. 358 - 363 |
---|---|
Main Authors | , , , , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
01.08.2012
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | Virtual Metrology (VM) and soft sensing modules have become popular in the past years and are now widely adopted in semiconductor plants. Nevertheless, few scientific works have so far investigated interactions between VM and Run-to-Run (R2R), the most common control approach in the field. In this paper, a novel strategy aimed at integrating VM and R2R relying on Information Theory measure is presented and motivated. The proposed control method penalizes statistical measurements based on their informative distance from real metrology data. This approach is also able to cope with the virtual loop control, in which the R2R runs for several process iterations without actual measurements, relying only on VM predictions. The results are compared with the current state-of-the-art by means of simulation studies based on realistic assumptions. |
---|---|
ISBN: | 1467304298 9781467304290 |
ISSN: | 2161-8070 2161-8089 |
DOI: | 10.1109/CoASE.2012.6386416 |