Petri net-based deadlock avoidance for single-arm cluster tools with concurrently processing two-type wafers

• Published in: 2018 IEEE 15th International Conference on Networking, Sensing and Control (ICNSC) pp. 1 - 6
• Main Authors: Lu, YanJun, Pan, ChunRong, Qiao, Yan, Wu, NaiQi, Chen, YuFeng
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01.03.2018
• Subjects: Cluster tools; deadlock avoidance; Petri nets; Robots; Scheduling; Semiconductor device modeling; semiconductor manufacturing; System recovery; Task analysis

A modern fabrication tends to arrange different wafer types with similar recipes in a lot in order to increase the utilization of cluster tools, meet the demand of customization, and improve the flexibility of the system. Nevertheless, the wafer flow patterns of the different wafer types may be diff...