Investigation of regularity of plasma formation in large volume on the basis of the hollow cathode effect using high-frequency short-pulsed voltage

The regularities of the nitrogen and argon plasma formation in a hollow cathode with the volume up to 0.2-0.5 m 3 using the short-pulsed (1-10 μs) high-frequency (100 kHz) voltage to 3 kV are presented in the paper. It is shown that despite the pulsed nature of voltage, the gaseous discharge steadil...

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Bibliographic Details
Published in2012 7th International Forum on Strategic Technology (IFOST) pp. 1 - 2
Main Authors Ryabchikov, A. I., Sivin, D. O., Ananin, P. S., Dodorin, K. Y.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.09.2012
Subjects
Argon
Cathodes
Discharges (electric)
Fault location
Glow discharges
high-voltage repetitively pulsed source
hollow cathode
nitrogen and argon plasma
Plasmas
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Summary:The regularities of the nitrogen and argon plasma formation in a hollow cathode with the volume up to 0.2-0.5 m 3 using the short-pulsed (1-10 μs) high-frequency (100 kHz) voltage to 3 kV are presented in the paper. It is shown that despite the pulsed nature of voltage, the gaseous discharge steadily burns at the pressure of 0.1 Pa and higher, the discharge current value and plasma concentration grow as the voltage pulse duration and voltage amplitude increase, the general discharge current reaches 10 A, providing the density of the ion saturation current on the items placed in plasma up to 0.5 mA/cm 2 .
ISBN:9781467317726
1467317721
DOI:10.1109/IFOST.2012.6357764