A comparison of approaches for ultra-low-loss waveguides

We compare ultra-low-loss silica waveguides with PECVD SiO 2 , borophosphosilicate glass (BPSG), and wafer-bonded thermal oxide upper claddings. We demonstrate fiber-like (0.045 dB/m) total propagation loss in planar waveguides with bonded thermal oxide upper claddings.

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Bibliographic Details
Published inOFC/NFOEC pp. 1 - 3
Main Authors Bauters, J. F., Heck, M. J. R., John, D. D., Barton, J. S., Blumenthal, D. J., Bowers, J. E., Bruinink, C. M., Leinse, A., Heideman, R. G.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.03.2012
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Summary:We compare ultra-low-loss silica waveguides with PECVD SiO 2 , borophosphosilicate glass (BPSG), and wafer-bonded thermal oxide upper claddings. We demonstrate fiber-like (0.045 dB/m) total propagation loss in planar waveguides with bonded thermal oxide upper claddings.
ISBN:1467302627
9781467302623