A comparison of approaches for ultra-low-loss waveguides
We compare ultra-low-loss silica waveguides with PECVD SiO 2 , borophosphosilicate glass (BPSG), and wafer-bonded thermal oxide upper claddings. We demonstrate fiber-like (0.045 dB/m) total propagation loss in planar waveguides with bonded thermal oxide upper claddings.
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Published in | OFC/NFOEC pp. 1 - 3 |
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Main Authors | , , , , , , , , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
01.03.2012
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Subjects | |
Online Access | Get full text |
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Summary: | We compare ultra-low-loss silica waveguides with PECVD SiO 2 , borophosphosilicate glass (BPSG), and wafer-bonded thermal oxide upper claddings. We demonstrate fiber-like (0.045 dB/m) total propagation loss in planar waveguides with bonded thermal oxide upper claddings. |
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ISBN: | 1467302627 9781467302623 |