SAW Accelerometers: Integration of Thick and Thin Film Technologies

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Bibliographic Details
Published inIEEE 1985 Ultrasonics Symposium pp. 591 - 594
Main Authors Bonbrake, T.B., Erikson, C.A., Thoma, D.
Format Conference Proceeding
LanguageEnglish
Published IEEE 1985
Subjects
Accelerometers
Assembly
Circuits
Delay lines
Electronics packaging
Fabrication
Surface acoustic waves
Testing
Transistors
Tuning
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DOI:10.1109/ULTSYM.1985.198578