Wide dynamic range direct accelerometer

• Published in: IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop pp. 153 - 157
• Main Authors: Henrion, W., DiSanza, L., Ip, M., Terry, S., Jerman, H.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 1990
• Subjects: Acceleration; Accelerometers; Control systems; Damping; Delta-sigma modulation; Dynamic range; Electrostatics; Finite element methods; Mechanical sensors; Silicon

The acceleration input-digital-output sigma-delta modulator accelerometer and the finite-element analysis of the mechanical structure are described. The performance obtained from prototype units is also presented. Silicon micromachining techniques were used to fabricate a high-precision, micro-gee a...