3.8 A 0.65V 900µm² BEoL RC-Based Temperature Sensor with ±1°C Inaccuracy from −25°C to 125°C

• Published in: 2024 IEEE International Solid-State Circuits Conference (ISSCC) Vol. 67; pp. 68 - 70
• Main Authors: Lien, Bei-Shing, Liu, Szu Lin, Lai, Wei-Lin, Lu, Yi-Chen, Peng, Yung-Chow, Hsieh, Kenny Cheng-Hsiang
• Format: Conference Proceeding
• Language: English
• Published: IEEE 18.02.2024
• Subjects: Heating systems; High performance computing; Resistors; Semiconductor device measurement; Temperature; Temperature measurement; Temperature sensors

To maintain high-performance computing capacity and prevent chip overheating, it is essential to minimize the gap between on-die thermal measurements and the actual temperature at hotspots. This relies primarily on the inherent accuracy of the temperature sensors and the distance to the heat sources...