Spectroscopic ellipsometry investigations of porous SiO2 films prepared by glancing angle deposition
We present the optical and the structural properties of porous SiO2 films fabricated by using a glancing angle deposition technique. The influence of the glancing angle on the pseudorefractive index of porous SiO2 films was studied by spectroscopic ellipsometry in the UV–visible region. The relation...
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Published in | Surface and interface analysis Vol. 45; no. 11-12; pp. 1690 - 1694 |
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Chichester
Blackwell Publishing Ltd
01.11.2013
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Abstract | We present the optical and the structural properties of porous SiO2 films fabricated by using a glancing angle deposition technique. The influence of the glancing angle on the pseudorefractive index of porous SiO2 films was studied by spectroscopic ellipsometry in the UV–visible region. The relationships among the pseudorefractive index, the porosity, and the glancing angle are determined. The results show that the pseudorefractive index decreases and the porosity increases with the increase of glancing angle. The minimum pseudorefractive index is found to be 1.11 at 532 nm for the porous SiO2 film deposited at a glancing angle of 87°. The structural and surface morphology of these samples was also investigated by using a scanning electron microscope. The results indicate that the as‐deposited SiO2 thin films are porous with a tilted‐columnar structure and low pseudorefractive index. Copyright © 2013 John Wiley & Sons, Ltd. |
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AbstractList | We present the optical and the structural properties of porous SiO2 films fabricated by using a glancing angle deposition technique. The influence of the glancing angle on the pseudorefractive index of porous SiO2 films was studied by spectroscopic ellipsometry in the UV–visible region. The relationships among the pseudorefractive index, the porosity, and the glancing angle are determined. The results show that the pseudorefractive index decreases and the porosity increases with the increase of glancing angle. The minimum pseudorefractive index is found to be 1.11 at 532 nm for the porous SiO2 film deposited at a glancing angle of 87°. The structural and surface morphology of these samples was also investigated by using a scanning electron microscope. The results indicate that the as‐deposited SiO2 thin films are porous with a tilted‐columnar structure and low pseudorefractive index. Copyright © 2013 John Wiley & Sons, Ltd. We present the optical and the structural properties of porous SiO2 films fabricated by using a glancing angle deposition technique. The influence of the glancing angle on the pseudorefractive index of porous SiO2 films was studied by spectroscopic ellipsometry in the UV-visible region. The relationships among the pseudorefractive index, the porosity, and the glancing angle are determined. The results show that the pseudorefractive index decreases and the porosity increases with the increase of glancing angle. The minimum pseudorefractive index is found to be 1.11 at 532nm for the porous SiO2 film deposited at a glancing angle of 87°. The structural and surface morphology of these samples was also investigated by using a scanning electron microscope. The results indicate that the as-deposited SiO2 thin films are porous with a tilted-columnar structure and low pseudorefractive index. Copyright © 2013 John Wiley & Sons, Ltd. [PUBLICATION ABSTRACT] |
Author | Yang, Shenghong Zhang, Yueli |
Author_xml | – sequence: 1 givenname: Shenghong surname: Yang fullname: Yang, Shenghong email: shenghongyang@163.com organization: State Key Laboratory of Optoelectronic Materials and Technologies, School of Physics and Engineering, Sun Yat-Sen University, 510275, Guangzhou, China – sequence: 2 givenname: Yueli surname: Zhang fullname: Zhang, Yueli organization: State Key Laboratory of Optoelectronic Materials and Technologies, School of Physics and Engineering, Sun Yat-Sen University, 510275, Guangzhou, China |
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Keywords | porous SiO films Inorganic compounds spectroscopic ellipsometry glancing angle deposition Silicon oxides pseudorefractive index Porous materials Ellipsometry |
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References | J.-Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S.-Y. Lin, W. Liu, J. M. Smart, Nat. Photonics 2007, 1, 176. K. Robbie, M. Brett, A. Lakhtakia, J. Vac. Sci. Technol. 1995, A13, 2991. M.-H. Jo, H.-H. Park, D.-J. Kim, S.-H. Hyun, S.-Y. Choi, J.-T. Paik, J. Appl. Phys. 1997, 82, 1299. K. Kaminska, K. Robbie, Appl. Opt. 2004, 43, 1570. D. J. Poxson, F. W. Mont, M. F. Schubert, J. K. Kim, E. F. Schubert, Appl. Phys. Lett. 2008, 93, 101914. S. V. Nitta, V. Pisupatti, A. Jain, P. C. Wayner Jr., W. N. Gill, J. L. Plawsky, J. Vac. Sci. Technol. 1999, B17, 205. B. E. Yoldas, P. W. Partlow, Thin Solid Films 1985, 129, 1. Q. Xu, V. R. Almeida, R. R. Panepucci, M. Lipson, Opt. Lett. 2004, 29, 1626. B. Tamelkuran, S. D. Hart, G. Benoit, J. D. Joannopoulos, Y. Fink, Nature 2002, 420, 650. J.-Q. Xi, M. Ojha, W. Cho, J. L. Plawsky, W. N. Gill, T. Gessmann, E. F. Schubert, Opt. Lett. 2005, 30, 1518. Y. J. Park, K. M. A. Sobahan, C. K. Hwangbo, Opt. Exp. 2008, 16, 5186. D. A. G. Bruggeman, Ann. Phys. Leipzig 1933, 24, 636. S. Kirkpatrick, C. D. Gelatt, M. P. Vecchi, Science 1983, 220, 671. J. M. Nieuwenhizen, H. B. Haanstra, Philips Tech. Rev. 1966, 27, 87. Y. J. Park, K. M. A. Sobahan, J. J. Kim, C. K. Hwangbo, Opt. Exp. 2009, 17, 10535. P. L. Washington, H. C. Ong, J. Y. Dai, R. P. H. Chang, Appl. Phys. Lett. 1998, 72, 3261. M. C. Y. Huang, Y. Zhou, C. J. Chang-Hasnain, Nat. Photonics 2007, 1, 119. J. K. Kim, S. Chhajed, M. F. Schubert, E. F. Schubert, A. J. Fischer, M. H. Crawford, J. Cho, H. Kim, C. Sone, Adv. Mater. 2008, 20, 801. G. E. Jellison, Jr., Opt. Mater. 1992, 1, 41. R. M. A. Azzam, N. M. Bashara, in Ellipsometry and Polarized Light, North-Holland, Amsterdam, 1977, p. 89. 2004; 43 1933; 24 1966; 27 1995; A13 1997; 82 1983; 220 2004; 29 1999; B17 2008; 16 2002; 420 2005; 30 1998; 72 1985; 129 2008; 20 2007; 1 1992; 1 2008; 93 2009; 17 1977 |
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Snippet | We present the optical and the structural properties of porous SiO2 films fabricated by using a glancing angle deposition technique. The influence of the... |
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SubjectTerms | Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science; rheology Exact sciences and technology glancing angle deposition Physics porous SiO2 films pseudorefractive index spectroscopic ellipsometry |
Title | Spectroscopic ellipsometry investigations of porous SiO2 films prepared by glancing angle deposition |
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