A novel approach for measuring ultra-thin, buried SiO2 film thickness - Jiang, Z. X.; Sieloff, D. D. (Surface and interface analysis, 2009)
Keywords: Beams (radiation); Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Exact sciences and technology; Incidence; Isotopes; oxide; Physics; Secondary ion mass spectrometry; Semiconductors; Silicon; Silicon dioxide; Silicon oxides; SIMS; thickness; Thin films; Thickness; SIMS; Inorganic compounds; Silicon oxides; oxide