Bottom-up methodology for predictive simulations of self-heating in aggressively scaled process technologies

• Published in: 2018 IEEE International Reliability Physics Symposium (IRPS) pp. 6F.6-1 - 6F.6-7
• Main Authors: Singh, D., Restrepo, O. D., Manik, P. P., Mavilla, N. Rao, Zhang, H., Paliwoda, P., Pinkett, S., Deng, Y., Silva, E. Cruz, Johnson, J. B., Bajaj, M., Furkay, S., Chbili, Z., Kerber, A., Christiansen, C., Narasimha, S., Maciejewski, E., Samavedam, S., Lin, C.-H.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01.03.2018
• Subjects: ab-initio; Electromigration; FinFET; Joule heating; Self heating; TCAD; Wiedemann-Franz law

We present a hierarchical methodology using a combination of ab-initio phonon scattering, electron transmission, and multi-scale finite element simulations to accurately model process specific material physics and component level self-heating in FinFET technologies. The framework is applied to expla...