Mitigating Process Induced Degradation in p- and n-Czochralski Silicon Wafers with Tabula Rasa
We report on the bulk properties of of n- and p- type Czochralski silicon (Cz-Si) after a high-temperature annealing process known as Tabula Rasa (TR), which is primarily used to annihilate oxygen precipitates. We find significant differences in n- and p-type substrates as well as a strong dependenc...
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Published in | 2019 IEEE 46th Photovoltaic Specialists Conference (PVSC) pp. 0068 - 0071 |
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Main Authors | , , , , , , |
Format | Conference Proceeding |
Language | English |
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IEEE
01.06.2019
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Abstract | We report on the bulk properties of of n- and p- type Czochralski silicon (Cz-Si) after a high-temperature annealing process known as Tabula Rasa (TR), which is primarily used to annihilate oxygen precipitates. We find significant differences in n- and p-type substrates as well as a strong dependence on the ambient in the resulting process induced degradation. We attribute this ambient dependence to either injection of interstitials or vacancies into the bulk during TR. Finally, we show that subsequent gettering is enhanced due to the annihilation of oxygen precipitates. |
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AbstractList | We report on the bulk properties of of n- and p- type Czochralski silicon (Cz-Si) after a high-temperature annealing process known as Tabula Rasa (TR), which is primarily used to annihilate oxygen precipitates. We find significant differences in n- and p-type substrates as well as a strong dependence on the ambient in the resulting process induced degradation. We attribute this ambient dependence to either injection of interstitials or vacancies into the bulk during TR. Finally, we show that subsequent gettering is enhanced due to the annihilation of oxygen precipitates. |
Author | LaSalvia, Vincenzo Agarwal, Sumit Page, Matthew Nemeth, William Young, David Stradins, Paul Meyer, Abigail R. |
Author_xml | – sequence: 1 givenname: Abigail R. surname: Meyer fullname: Meyer, Abigail R. organization: Colorado School of Mines,Golden,CO,USA,80401 – sequence: 2 givenname: Vincenzo surname: LaSalvia fullname: LaSalvia, Vincenzo organization: National Renewable Energy Laboratory,Golden,CO,USA,80401 – sequence: 3 givenname: William surname: Nemeth fullname: Nemeth, William organization: National Renewable Energy Laboratory,Golden,CO,USA,80401 – sequence: 4 givenname: Matthew surname: Page fullname: Page, Matthew organization: National Renewable Energy Laboratory,Golden,CO,USA,80401 – sequence: 5 givenname: David surname: Young fullname: Young, David organization: National Renewable Energy Laboratory,Golden,CO,USA,80401 – sequence: 6 givenname: Sumit surname: Agarwal fullname: Agarwal, Sumit organization: Colorado School of Mines,Golden,CO,USA,80401 – sequence: 7 givenname: Paul surname: Stradins fullname: Stradins, Paul organization: National Renewable Energy Laboratory,Golden,CO,USA,80401 |
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Snippet | We report on the bulk properties of of n- and p- type Czochralski silicon (Cz-Si) after a high-temperature annealing process known as Tabula Rasa (TR), which... |
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SubjectTerms | Annealing Conferences Degradation Gettering Indexes light-induced degradation Photovoltaic systems process-induced degradation Silicon Tabula Rasa |
Title | Mitigating Process Induced Degradation in p- and n-Czochralski Silicon Wafers with Tabula Rasa |
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