Recent progress in Ga2O3 power devices - Higashiwaki, Masataka; Sasaki, Kohei; Murakami, Hisashi; Kumagai, Yoshinao; Koukitu, Akinori; Kuramata, Akito; Masui, Takekazu; Yamakoshi, Shigenobu (Semiconductor science and technology, 2016)
Keywords: edge-defined film-fed growth; gallium oxide; halide vapor phase epitaxy; molecular beam epitaxy; power devices