Optimization of Ferroelectric Properties of HfO2-Based Thin Films by Ion Irradiation - Liao, Ningtao; Lin, Xin; Zhu, Bingyan; Zhong, Xiangli; Jiang, Limei; Ouyang, Xiaoping (IEEE transactions on nuclear science, 2024)
Keywords: Computational material science; Ferroelectric materials; ferroelectric thin film; Ferroelectricity; Hafnium compounds; Hafnium oxide; HfO₂-based materials; Incidence angle; ion implantation; Ion irradiation; Ions; Irradiation; Loading; Mathematical models; Microscopy; Monte Carlo simulation; Optimization; Oxygen; oxygen vacancy; Radiation; radiation dosage; Radiation effects; Simulation analysis; Synergistic effect; Thin films; transformation behavior