Novel hydrothermal processing (<100/spl deg/C) of ceramic-polymer composites for integral capacitor applications

• Published in: 52nd Electronic Components and Technology Conference 2002. (Cat. No.02CH37345) pp. 1699 - 1703
• Main Authors: Balaraman, D., Markondeya Raj, P., Bhattacharya, S., Tummala, R.R.
• Format: Conference Proceeding
• Language: English
• Published: Piscataway NJ IEEE 2002
• Subjects: Applied sciences; Barium; Capacitors; Costs; Dielectric constant; Dielectric, amorphous and glass solid devices; Electronics; Exact sciences and technology; High K dielectric materials; High-K gate dielectrics; Polymer films; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Temperature; Testing, measurement, noise and reliability; Titanium compounds; Transistors; Heat treatment; Polymer films; Polymer; Porous material; Composite material; Optimization; Thin film; Dielectric thin films; Capacitance; Reliability; Microstructure; Capacitor; Permittivity
• DOI: 10.1109/ECTC.2002.1008337
• ISBN: 9780780374300; 0780374304
• ISSN: 0569-5503

Synthesis of high K thin films via low cost low temperature process remains a major challenge in realizing integral capacitors for SOP applications. The current study explores synthesis of Barium Titanate by Hydrothermal process. BaTiO/sub 3/ films using hydrothermal synthesis at temperatures less than 100/spl deg/C has been reported previously. However, these films are typically porous and hence give a very low dielectric constant and low yield. Precursor films are hence heat-treated and densified at temperatures higher than 300/spl deg/C to obtain a good yield and hence a high dielectric constant which makes these processes incompatible with organic based build-up processes. Hence the process was modified to infiltrate a polymer into these porous films to improve the yield, reliability and subsequent processing of these films. BaTiO/sub 3/ films were also synthesized on Titanium foils with the goal of integrating them with the standard PWB processes. Dielectric constant of 700 and specific capacitances more than 1000 nF/cm/sup 2/ have been achieved by this modified hydrothermal process. The microstructure of the film and the polymer infiltration can be optimized to synthesize reliable films with high dielectric constant and low loss tangent. Hence, the film morphology and thickness are being studied to optimize the processing conditions for reliable films.