Orientation Dependent Structural Facet Recognition Method in Anisotropic Wet Etching on R-plane Single Crystal Sapphire - Yao, Jiabao; Qian, Jin; Qiu, Xiaoli; Xing, Yan (2021 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM), 2021)
Keywords: Fabrication; Face recognition; Fitting; Numerical models; Offset rectangular trench; Orientation dependent etching; Predictive models; r-plane sapphire; Surfaces; Wet etching