An insight into optical metrology in manufacturing

• Published in: Measurement science & technology Vol. 32; no. 4
• Main Authors: Shimizu, Yuki, Chen, Liang-Chia, Kim, Dae Wook, Chen, Xiuguo, Li, Xinghui, Matsukuma, Hiraku
• Format: Journal Article
• Language: English
• Published: IOP Publishing 01.04.2021
• Subjects: deflectometry; diffractometry; interferometry; optical coherence tomography; optical metrology; scatterometry; super-resolution

Optical metrology is one of the key technologies in today's manufacturing industry. In this article, we provide an insight into optical measurement technologies for precision positioning and quality assessment in today's manufacturing industry. First, some optical measurement technologies...