An insight into optical metrology in manufacturing - Shimizu, Yuki; Chen, Liang-Chia; Kim, Dae Wook; Chen, Xiuguo; Li, Xinghui; Matsukuma, Hiraku (Measurement science & technology, 2021)
Keywords: deflectometry; diffractometry; interferometry; optical coherence tomography; optical metrology; scatterometry; super-resolution