APA (7th ed.) Citation

Shimizu, Y., Chen, L., Kim, D. W., Chen, X., Li, X., & Matsukuma, H. (2021). An insight into optical metrology in manufacturing. Measurement science & technology, 32(4), . https://doi.org/10.1088/1361-6501/abc578

Chicago Style (17th ed.) Citation

Shimizu, Yuki, Liang-Chia Chen, Dae Wook Kim, Xiuguo Chen, Xinghui Li, and Hiraku Matsukuma. "An Insight into Optical Metrology in Manufacturing." Measurement Science & Technology 32, no. 4 (2021). https://doi.org/10.1088/1361-6501/abc578.

MLA (9th ed.) Citation

Shimizu, Yuki, et al. "An Insight into Optical Metrology in Manufacturing." Measurement Science & Technology, vol. 32, no. 4, 2021, https://doi.org/10.1088/1361-6501/abc578.