Using Liquid Electrolytes in Dielectric Reliability Studies

In reliability studies, thin dielectric films are normally placed between two solid electrodes and a potential difference is applied, which produces local physical changes in the dielectric. However, studying such features is very complex due to the need of etching one of the solid electrodes. Here...

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Bibliographic Details
Published in2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) pp. 1 - 6
Main Authors Lanza, Mario, Hui, Fei, Shi, Yuanyuan, Han, Tingting, Tang, Kechao, Meng, Andrew C., McIntyre, Paul C., Petach, Trevor, Goldhaber-Gordon, David, Hitzman, Charles, Koh, Ai Leen
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.07.2018
Subjects
charge trapping
Conductivity
dielectric breakdown
Dielectrics
electrical characterization
Electrodes
Electrolytes
Liquid electrolytes
Liquids
Reliability
SILC
Stress
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Summary:In reliability studies, thin dielectric films are normally placed between two solid electrodes and a potential difference is applied, which produces local physical changes in the dielectric. However, studying such features is very complex due to the need of etching one of the solid electrodes. Here we show that liquid electrolytes can be used to study the reliability of thin dielectrics. Their main advantage is that after the electrical stress, the liquid can be rinsed, exposing the surface for direct characterization.
ISSN:1946-1550
DOI:10.1109/IPFA.2018.8452552