Development of micro-system encapsulation for silicon devices which are in contact with human cells

• Published in: 2017 IEEE CPMT Symposium Japan (ICSJ) pp. 99 - 102
• Main Authors: Souriau, J.-C., Quiniou, C., Castagne, L., Simon, G.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01.11.2017
• Subjects: Biocompatible; Corrosion; Degradation; Encapsulation; Optical buffering; Silicon; Silicon compounds; Silicon device; Silicon devices; Thin film packaging

In this paper the CEA LETI proposes a silicon test vehicle and method to quantify the degradation of packaging in a biological medium. Those developments are suited for medicals devices which are potentially in contact with human cells. Different solutions of encapsulation, performed at the wafer le...