Development of micro-system encapsulation for silicon devices which are in contact with human cells

In this paper the CEA LETI proposes a silicon test vehicle and method to quantify the degradation of packaging in a biological medium. Those developments are suited for medicals devices which are potentially in contact with human cells. Different solutions of encapsulation, performed at the wafer le...

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Bibliographic Details
Published in2017 IEEE CPMT Symposium Japan (ICSJ) pp. 99 - 102
Main Authors Souriau, J.-C., Quiniou, C., Castagne, L., Simon, G.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.11.2017
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