Optofluidic in-situ fabrication of magnetic actuators in microfluidic channels

We demonstrate in-situ fabrication of magnetic actuators using optofluidic maskless lithography (OFML). Photopatterning of magnetic structures in same place with actuation area reduces extra steps for transportation from the fabrication site to actuation site.

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Bibliographic Details
Published inCLEO/QELS: 2010 Laser Science to Photonic Applications pp. 1 - 2
Main Authors Su Eun Chung, Jiyun Kim, Seungki Min, Kim, Nari Lily, Sunghoon Kwon
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.05.2010
Subjects
(220.3740) Lithography
(220.4000) Microstructure fabrication
Actuators
Fabrication
Lithography
Magnetic fields
Magnetic materials
Microfluidics
Micromachining
Microstructure
Nanoparticles
Rails
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Summary:We demonstrate in-situ fabrication of magnetic actuators using optofluidic maskless lithography (OFML). Photopatterning of magnetic structures in same place with actuation area reduces extra steps for transportation from the fabrication site to actuation site.
DOI:10.1364/cleo.2010.jwa62