Lithium niobate MEMS devices and subsystems for radio frequency signal processing - Songbin Gong; Yong-Ha Song; Manzaneque, Tomas; Ruochen Lu; Yansong Yang; Kourani, Ali (Conference proceedings : Midwest Symposium on Circuits and Systems, 2017)
Keywords: Chirp; Electrodes; Internet of Things; Lithium niobate; MEMS; Micromechanical devices; Radio frequency; Resonator filters; Resonators; VCO