Nanosecond Laser Anneal for BEOL Performance Boost in Advanced FinFETs - Lee, Rinus T.P.; Petrov, N.; Kassim, J.; Gribelyuk, M.; Yang, J.; Cao, L.; Yeap, K.B.; Shen, T.; Zainuddin, A. N.; Chandrashekar, A.; Ray, S.; Ramanathan, E.; et al. (2018 IEEE Symposium on VLSI Technology, 2018)
Keywords: Annealing; Capacitance; Integrated circuit interconnections; Lasers; Measurement by laser beam; Performance evaluation; Resistance