Interoperating Simulations of Automatic Material Handling Systems and Manufacturing Processes

To perform a high fidelity simulation study on a 300 mm wafer fabrication plant, modeling of the manufacturing process (MP) alone is not sufficient. Inclusion of the automated material handling system (AMHS) model is necessary due to the high degree of factory automation. There isn't, however,...

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Bibliographic Details
Published inProceedings of the 2006 Winter Simulation Conference pp. 1129 - 1135
Main Authors Boon Ping Gan, Lai Peng Chan, Turner, S.J.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.12.2006
Subjects
Computational modeling
Discrete event simulation
Gallium nitride
Manufacturing automation
Manufacturing processes
Materials handling
Middleware
Packaging
Semiconductor device manufacture
Semiconductor device modeling
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Summary:To perform a high fidelity simulation study on a 300 mm wafer fabrication plant, modeling of the manufacturing process (MP) alone is not sufficient. Inclusion of the automated material handling system (AMHS) model is necessary due to the high degree of factory automation. There isn't, however, a single tool that is capable of modeling both the AMHS and MP with sufficient accuracy and granularity. A commercial simulation package such as AutoMod is usually used to model the AMHS while AutoSched AP is usually used to model the MP. These packages can be integrated using the supplied interoperation module but flexibility in optimizing the execution performance for different simulation models is lacking. In this paper, we present an approach to interoperation based on the high level architecture standard. We note that the typical characteristics of disparity in the models' time granularity and frequent model interactions are the obstacle to good execution performance
ISBN:1424405009
9781424405008
ISSN:0891-7736
1558-4305
DOI:10.1109/WSC.2006.323203