A High-Sensitivity Microfluidic Chip Calorimeter for Biochemical Reaction Monitoring Applications

• Published in: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) pp. 1140 - 1143
• Main Authors: Huang, Jianze, Zhang, Congchun, Ding, Guifu, Yang, Zhuoqing, Zhao, Xiaolin, Liu, Yang, Tang, Zhiyong, Shao, Xiufeng, Yang, Shenyong, Lin, Xingkai
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01.06.2019
• Subjects: Bi-Sb thermopile; biochemical process; Chip calorimeter; heat detection; Heating systems; high-sensitivity; Junctions; Microfluidics; real time; Semiconductor device measurement; Sensitivity; Thermal sensors; Voltage measurement

Miniaturized calorimeter can monitor biochemical procedures by just detecting heat change during the reaction with minimum reagent consumption and short inspection time. This paper presents a high-sensitivity chip calorimeter fabricated by micromachining process. The device is composed of a polyimid...