Analysis and stability of a silicon-based thermally actuated MEMS viscosity sensor

• Published in: 2017 IEEE 37th International Conference on Electronics and Nanotechnology (ELNANO) pp. 75 - 78
• Main Authors: Puchades, Ivan, Fuller, Lynn F., Lyshevski, Sergey E.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01.04.2017
• Subjects: electronics; Frequency measurement; Heating systems; MEMS; Micromechanical devices; sensors; Silicon; Temperature measurement; thermal actuator; vibration; Vibrations; Viscosity

The proposed MEMS-technology viscosity sensor solves two major drawbacks associated with current state of the art MEMS viscosity sensors, such as: (1) Functional complexity and integration of external components for actuation and subsequent data acquisition; (2) Fabrication incompatibilities with CM...