An efficient method for substrate impedance extraction

• Published in: Research in Microelectronics and Electronics, 2005 PhD Vol. 2; pp. 47 - 50
• Main Authors: Wang, Q., van der Meijs, N.P.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 2005
• Subjects: Analog integrated circuits; Capacitance; Circuit simulation; Conductivity; Dielectric substrates; Digital integrated circuits; Frequency dependence; Impedance; Silicon; Surface treatment
• DOI: 10.1109/RME.2005.1542933
• ISBN: 0780393457; 9780780393455

A technique for extraction of substrate impedance from low frequency to high frequency has been presented. The Complex Green’s function is also applied as a reference and FEMLAB has been used as an independent validation. Some simulations have been done to show that our method is asymptotically correct at sufficiently low and high frequencies and acceptable at intermediate frequencies. Our contribution is to show that an approach based on just combining separately obtained R and C models for low and high frequency situations results in relatively small errors and can thus be highly effective. The advantage lies in a reduced computational effort for extraction and simulation (the model is frequency independent).