An efficient method for substrate impedance extraction

A technique for extraction of substrate impedance from low frequency to high frequency has been presented. The Complex Green’s function is also applied as a reference and FEMLAB has been used as an independent validation. Some simulations have been done to show that our method is asymptotically corr...

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Bibliographic Details
Published inResearch in Microelectronics and Electronics, 2005 PhD Vol. 2; pp. 47 - 50
Main Authors Wang, Q., van der Meijs, N.P.
Format Conference Proceeding
LanguageEnglish
Published IEEE 2005
Subjects
Analog integrated circuits
Capacitance
Circuit simulation
Conductivity
Dielectric substrates
Digital integrated circuits
Frequency dependence
Impedance
Silicon
Surface treatment
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Summary:A technique for extraction of substrate impedance from low frequency to high frequency has been presented. The Complex Green’s function is also applied as a reference and FEMLAB has been used as an independent validation. Some simulations have been done to show that our method is asymptotically correct at sufficiently low and high frequencies and acceptable at intermediate frequencies. Our contribution is to show that an approach based on just combining separately obtained R and C models for low and high frequency situations results in relatively small errors and can thus be highly effective. The advantage lies in a reduced computational effort for extraction and simulation (the model is frequency independent).
ISBN:0780393457
9780780393455
DOI:10.1109/RME.2005.1542933