Microfluidic capacitive tilt sensor using PCB-MEMS

• Published in: 2015 IEEE International Conference on Industrial Technology (ICIT) pp. 3356 - 3360
• Main Authors: Salvador, Blas, Luque, Antonio, Quero, Jose M.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01.03.2015
• Subjects: Capacitance; Capacitance measurement; Electrodes; Fabrication; Inclinometer; Liquids; MEMS; Microfluidic; PCB; Robot sensing systems; Surface tension; Tilt Sensor

This paper presents a low-cost tilt sensor based on fluidic movement and fabricated using PCB-MEMS techniques. The principle of operation is the measurement of capacitance change between two electronics inside a circular channel, partially filled with a non-conductive liquid. Physical principle and...