Analysis of BOX Layer Thickness on SERs of 65 and 28nm FD-SOI Processes by a Monte-Carlo Based Simulation Tool

We estimate SERs of FD-SOI structures according to the thicknesses of BOX (Buird OXide) layer on 65-nm and 28-nm processes by reducing supply voltage. Alpha, neutron irradiation experiments and Monte-Carlo based simulations are compared in this work. The SOTB (Silicon on Thin BOX) and the UTBB (Ultr...

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Published in2015 15th European Conference on Radiation and Its Effects on Components and Systems (RADECS) pp. 1 - 5
Main Authors Kuiyuan Zhang, Kanda, Shohei, Yamaguchi, Junki, Furuta, Jun, Kobayashi, Kazutoshi
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.09.2015
Subjects
Alpha particles
Analytical models
Latches
Neutrons
Radiation effects
Simulation
Solid modeling
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Abstract We estimate SERs of FD-SOI structures according to the thicknesses of BOX (Buird OXide) layer on 65-nm and 28-nm processes by reducing supply voltage. Alpha, neutron irradiation experiments and Monte-Carlo based simulations are compared in this work. The SOTB (Silicon on Thin BOX) and the UTBB (Ultra Thin Body and BOX) structures are evaluated in the irradiation experiments. The SERs of those structures are analyzed by the simulation tool with layout pattern of test chips. The simulation results are consistent with the alpha and neutron irradiation measurement results. According to the simulated result, the SERs are decreased by increasing the thickness of BOX layer.
AbstractList We estimate SERs of FD-SOI structures according to the thicknesses of BOX (Buird OXide) layer on 65-nm and 28-nm processes by reducing supply voltage. Alpha, neutron irradiation experiments and Monte-Carlo based simulations are compared in this work. The SOTB (Silicon on Thin BOX) and the UTBB (Ultra Thin Body and BOX) structures are evaluated in the irradiation experiments. The SERs of those structures are analyzed by the simulation tool with layout pattern of test chips. The simulation results are consistent with the alpha and neutron irradiation measurement results. According to the simulated result, the SERs are decreased by increasing the thickness of BOX layer.
Author Yamaguchi, Junki
Furuta, Jun
Kuiyuan Zhang
Kanda, Shohei
Kobayashi, Kazutoshi
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  givenname: Kazutoshi
  surname: Kobayashi
  fullname: Kobayashi, Kazutoshi
  organization: Grad. Sch. of Sci. & Technol., Kyoto Inst. of Technol., Kyoto, Japan
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Snippet We estimate SERs of FD-SOI structures according to the thicknesses of BOX (Buird OXide) layer on 65-nm and 28-nm processes by reducing supply voltage. Alpha,...
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SubjectTerms Alpha particles
Analytical models
Latches
Neutrons
Radiation effects
Simulation
Solid modeling
Title Analysis of BOX Layer Thickness on SERs of 65 and 28nm FD-SOI Processes by a Monte-Carlo Based Simulation Tool
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