Multi-technology design of an integrated MEMS-based RF oscillator using a novel silicon-ceramic compound substrate

• Published in: 2015 German Microwave Conference pp. 406 - 409
• Main Authors: Podoskin, D., Bruckner, K., Fischer, M., Gropp, S., Krausse, D., Nowak, J., Hoffmann, M., Muller, J., Sommer, R., Hein, M. A.
• Format: Conference Proceeding
• Language: English
• Published: IMA: IMATech e.V 01.03.2015
• Subjects: Ceramics; CMOS; Integrated circuit modeling; Micromechanical devices; Oscillators; Piezoelectric MEMS resonator; Radio frequency; Resonant frequency; RF oscillator; SiCer substrate; Substrates

In this paper, an approach towards the realization of a hybrid MEMS-CMOS RF oscillator module using the novel silicon-ceramic (SiCer) compound substrate technology is described. Piezoelectric aluminium-nitride MEMS resonators with quality factors Q up to 2,200 and resonant frequencies of 240, 400 an...