Management Strategies for Monocrystalline SiC Substrate Production Lines under Downtime Disturbances

• Published in: 2022 International Conference on Automation, Robotics and Computer Engineering (ICARCE) pp. 1 - 5
• Main Authors: Zhu, Xisheng, Zhang, Dan, Ai, Wenhao, Fu, Weidong, Zuo, Dunwen
• Format: Conference Proceeding
• Language: English
• Published: IEEE 16.12.2022
• Subjects: optimal control; performance prediction; production line disturbance; SiC substrate; window of opportunity

In order to reduce the system performance loss and restore the normal operation for the downtime disturbance event on the monocrystalline SiC substrate production line, a prediction model of the performance of the SiC wafer substrate production line is established based on the G/G/m/b queuing model....