A 50x20 Row-Column Addressed PMUT Array on Silicon Substrate for Imaging - Joshi, Sanjog Vilas; Sadeghpour, Sina; Kraft, Michael (IEEE International Ultrasonics Symposium (Online), 2023)
Keywords: Fabrication; medical imaging; piezo-MEMS; piezoelectric thin films; PMUT; PZT; Resonant frequency; Sensitivity; Silicon-on-insulator; Ultrasonic transducer arrays; Ultrasonic transducers; ultrasound transducers; Vibrometers