Dielectric less capacitive MEMS switches - Blondy, P.; Crunteanu, A.; Champeaux, C.; Catherinot, A.; Tristant, P.; Vendier, O.; Cazaux, J.L.; Marchand, L. (2004 IEEE MTT-S International Microwave Symposium, 2004)
Keywords: Applied sciences; Circuit properties; Contacts; Dielectric devices; Dielectric loss measurement; Electric, optical and optoelectronic circuits; Electrodes; Electronic circuits; Electronics; Exact sciences and technology; Fabrication; Micro- and nanoelectromechanical devices (mems/nems); Microswitches; Radiofrequency microelectromechanical systems; Resists; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Switches; Switching, multiplexing, switched capacity circuits; Voltage; Performance evaluation; Dielectric charge; Charge carrier trapping; Selector switch; Failures; Microelectromechanical device