A Novel Multiple Modes Resonant Sensor Featuring Blue Sideband Excitation

• Published in: IEEE ... Symposium on Mass Storage Systems and Technologies pp. 825 - 828
• Main Authors: Xu, Jiao, Zheng, Zhuoyue, Xi, Jingqian, Zhang, Ziqian, Liu, Huafeng, Zhang, Pan, Chen, Jianlin, Wang, Chen, Kraft, Michael, Wang, Yuan, Martins, R. P., Mak, Pui-In
• Format: Conference Proceeding
• Language: English
• Published: IEEE 19.01.2025
• Subjects: blue-sideband excitation; Electric potential; Electrostatics; Micromechanical devices; Multi-modal Resonator; multi-parameter sensing; Noise; Perturbation methods; resonant MEMS sensors; Sensitivity; Sensors; Temperature; Temperature measurement; Temperature sensors
• ISSN: 2160-1968
• DOI: 10.1109/MEMS61431.2025.10917831

This paper reports a novel MEMS resonant structure functioning as a baseline resonant electrostatic force/temperature sensor, highlighting its substantial potential in sensing applications. The resonator, characterized by a dual-cosine structure, is capable of simultaneous multiple resonant modes ac...