A Novel Multiple Modes Resonant Sensor Featuring Blue Sideband Excitation - Xu, Jiao; Zheng, Zhuoyue; Xi, Jingqian; Zhang, Ziqian; Liu, Huafeng; Zhang, Pan; Chen, Jianlin; Wang, Chen; Kraft, Michael; Wang, Yuan; Martins, R. P.; Mak, Pui-In (IEEE ... Symposium on Mass Storage Systems and Technologies, 2025)
Keywords: blue-sideband excitation; Electric potential; Electrostatics; Micromechanical devices; Multi-modal Resonator; multi-parameter sensing; Noise; Perturbation methods; resonant MEMS sensors; Sensitivity; Sensors; Temperature; Temperature measurement; Temperature sensors