APA (7th ed.) Citation

Qingduo, D., Guozheng, W., Yang, W., Ye, L., Shencheng, F., & Xin, W. (2009, August). Preparation of macroporous silicon array by micromachining processes. 2009 International Conference on Mechatronics and Automation, 1866-1870. https://doi.org/10.1109/ICMA.2009.5244996

Chicago Style (17th ed.) Citation

Qingduo, Duanmu, Wang Guozheng, Wang Yang, Li Ye, Fu Shencheng, and Wang Xin. "Preparation of Macroporous Silicon Array by Micromachining Processes." 2009 International Conference on Mechatronics and Automation Aug. 2009: 1866-1870. https://doi.org/10.1109/ICMA.2009.5244996.

MLA (9th ed.) Citation

Qingduo, Duanmu, et al. "Preparation of Macroporous Silicon Array by Micromachining Processes." 2009 International Conference on Mechatronics and Automation, Aug. 2009, pp. 1866-1870, https://doi.org/10.1109/ICMA.2009.5244996.