Study on the dielectric properties of Al2O3/TiO2 sub-nanometric laminates: effect of the bottom electrode and the total thickness

• Published in: Journal of physics. D, Applied physics Vol. 51; no. 6
• Main Authors: Ben Elbahri, M, Kahouli, A, Mercey, B, Lebedev, O, Donner, W, Lüders, U
• Format: Journal Article
• Language: English
• Published: IOP Publishing 19.01.2018
• Subjects: binary oxide; dielectric materials; Engineering Sciences; interfaces; Materials; thin films; Thin films; Interfaces; Binary oxide; Dielectric materials

Dielectrics based on amorphous sub-nanometric laminates of TiO2 and Al2O3 are subject to elevated dielectric losses and leakage currents, in large parts due to the extremely thin individual layer thickness chosen for the creation of the Maxwell-Wagner relaxation and therefore the high apparent diele...