The microstructure, optical and gas sensing properties of bilayer TiO2/ZnO systems in terms of annealing temperature

Similar to the single layers, the electrical and optical parameters of bilayer systems strongly depend on the crystallite properties (size, shape and distribution function) and the lattice defects of each layer. Moreover, the interactions and processes between the particles at the interface of two l...

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Published inMaterials science in semiconductor processing Vol. 121
Main Authors Kheiri, Fariba, Soleimanian, Vishtasb, Ghasemi, Mohsen, Mokhtari, Ali
Format Journal Article
LanguageEnglish
Published Elsevier Ltd 01.01.2021
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Abstract Similar to the single layers, the electrical and optical parameters of bilayer systems strongly depend on the crystallite properties (size, shape and distribution function) and the lattice defects of each layer. Moreover, the interactions and processes between the particles at the interface of two layers can affect directly the physical properties of bilayer films. In order to study the above subject, in this study two famous metal oxide semiconductors i.e. zinc oxide and titanium oxide are selected. The bilayer films are annealed at temperature interval between 400 and 600°C. The phase fractions, microstructure parameters and surface morphology of the films are studied as a function of annealing temperature, using the X-ray diffraction patterns and scanning electron microscope images which confirm the presence of two various ZnO components with different crystallite size and lattice strain. The effective optical band gap in addition to the refractive index of films are estimated as a function of the annealing temperature, crystallite size and density of defects. The gas sensing properties of films in the presence of ethanol gas are also studied as a function of time interval, gas concentration and operating temperature. Finally, the effects of X-ray diffraction analysis and scanning electron microscope results are investigated on the gas sensitivity of our bilayer films.
AbstractList Similar to the single layers, the electrical and optical parameters of bilayer systems strongly depend on the crystallite properties (size, shape and distribution function) and the lattice defects of each layer. Moreover, the interactions and processes between the particles at the interface of two layers can affect directly the physical properties of bilayer films. In order to study the above subject, in this study two famous metal oxide semiconductors i.e. zinc oxide and titanium oxide are selected. The bilayer films are annealed at temperature interval between 400 and 600°C. The phase fractions, microstructure parameters and surface morphology of the films are studied as a function of annealing temperature, using the X-ray diffraction patterns and scanning electron microscope images which confirm the presence of two various ZnO components with different crystallite size and lattice strain. The effective optical band gap in addition to the refractive index of films are estimated as a function of the annealing temperature, crystallite size and density of defects. The gas sensing properties of films in the presence of ethanol gas are also studied as a function of time interval, gas concentration and operating temperature. Finally, the effects of X-ray diffraction analysis and scanning electron microscope results are investigated on the gas sensitivity of our bilayer films.
ArticleNumber 105462
Author Mokhtari, Ali
Soleimanian, Vishtasb
Kheiri, Fariba
Ghasemi, Mohsen
Author_xml – sequence: 1
  givenname: Fariba
  surname: Kheiri
  fullname: Kheiri, Fariba
– sequence: 2
  givenname: Vishtasb
  surname: Soleimanian
  fullname: Soleimanian, Vishtasb
  email: soleimanian@sku.ac.ir
– sequence: 3
  givenname: Mohsen
  surname: Ghasemi
  fullname: Ghasemi, Mohsen
– sequence: 4
  givenname: Ali
  surname: Mokhtari
  fullname: Mokhtari, Ali
BookMark eNotkM1qwzAQhEVJoUnaF-hJD1AnK8lWJOilhP5BIJf00ouR5XWqYMtGUgp5-9ptTzvs7szAtyAz33sk5J7BigGT69Oqi3FYceDTosglvyJzpjYiy0Gx2aiF1JkCYDdkEeMJAArO5JykwxfSztnQxxTONp0DPtB-SM6alhpf06OJNKKPzh_pEPoBQ3IYad_QyrXmgoEe3J6vP_2exktM2EXqPE0Yut8n4z2adjKPp9FspoZbct2YNuLd_1ySj5fnw_Yt2-1f37dPuww5qJTlFsWGmaLSWkvZGFvlVishQApQpi64UBVarY3idYO8ZqB4A4ZXRmlrcymW5PEvF8eSb4ehjNaht1i7gDaVde9KBuVEsDyVE8FyIlj-ERQ_Id5qhA
ContentType Journal Article
Copyright 2020 Elsevier Ltd
Copyright_xml – notice: 2020 Elsevier Ltd
DOI 10.1016/j.mssp.2020.105462
DatabaseTitleList
DeliveryMethod fulltext_linktorsrc
Discipline Engineering
EISSN 1873-4081
ExternalDocumentID S1369800120313949
GroupedDBID --K
--M
-~X
.DC
.~1
0R~
1B1
1~.
1~5
29M
4.4
457
4G.
5GY
5VS
7-5
71M
8P~
AABXZ
AACTN
AAEDT
AAEDW
AAEPC
AAIAV
AAIKJ
AAKOC
AALRI
AAOAW
AAQFI
AAQXK
AAXUO
ABFRF
ABJNI
ABMAC
ABXDB
ABXRA
ABYKQ
ACBEA
ACDAQ
ACGFO
ACGFS
ACNNM
ACRLP
ADBBV
ADEZE
ADMUD
ADTZH
AEBSH
AECPX
AEFWE
AEKER
AENEX
AEZYN
AFFNX
AFKWA
AFRZQ
AFTJW
AGHFR
AGUBO
AGYEJ
AHJVU
AIEXJ
AIKHN
AITUG
AJBFU
AJOXV
AKRWK
ALMA_UNASSIGNED_HOLDINGS
AMFUW
AMRAJ
ASPBG
AVWKF
AXJTR
AZFZN
BJAXD
BKOJK
BLXMC
CS3
DU5
EBS
EFJIC
EJD
EO8
EO9
EP2
EP3
FDB
FEDTE
FGOYB
FIRID
FNPLU
FYGXN
G-Q
GBLVA
HVGLF
HZ~
IHE
J1W
JJJVA
KOM
M41
MAGPM
MO0
N9A
O-L
O9-
OAUVE
OZT
P-8
P-9
P2P
PC.
Q38
R2-
RIG
ROL
RPZ
SDF
SDG
SDP
SES
SEW
SPC
SPCBC
SSM
SST
SSZ
T5K
UNMZH
XFK
XPP
ZMT
~G-
ID FETCH-LOGICAL-e208t-4ce371a5b99966facb4c983306308ad5238bec99a82dfe2d1082f0a2ba89cc463
IEDL.DBID .~1
ISSN 1369-8001
IngestDate Sun Apr 21 12:55:50 EDT 2024
IsPeerReviewed true
IsScholarly true
Keywords Scanning electron microscopy
Effective optical band gap
X-ray diffraction analysis
ZnO/TiO2 bilayers
Gas sensing properties
Language English
LinkModel DirectLink
MergedId FETCHMERGED-LOGICAL-e208t-4ce371a5b99966facb4c983306308ad5238bec99a82dfe2d1082f0a2ba89cc463
ParticipantIDs elsevier_sciencedirect_doi_10_1016_j_mssp_2020_105462
PublicationCentury 2000
PublicationDate January 2021
PublicationDateYYYYMMDD 2021-01-01
PublicationDate_xml – month: 01
  year: 2021
  text: January 2021
PublicationDecade 2020
PublicationTitle Materials science in semiconductor processing
PublicationYear 2021
Publisher Elsevier Ltd
Publisher_xml – name: Elsevier Ltd
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SSID ssj0005216
Score 2.326659
Snippet Similar to the single layers, the electrical and optical parameters of bilayer systems strongly depend on the crystallite properties (size, shape and...
SourceID elsevier
SourceType Publisher
SubjectTerms Effective optical band gap
Gas sensing properties
Scanning electron microscopy
X-ray diffraction analysis
ZnO/TiO2 bilayers
Title The microstructure, optical and gas sensing properties of bilayer TiO2/ZnO systems in terms of annealing temperature
URI https://dx.doi.org/10.1016/j.mssp.2020.105462
Volume 121
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV3PS8MwFA5DL3oQf-LPkYNHY9c0a9LjGI7pcAPdcHgpSZqMiuvGOq_-7ealncyrp0L7AuW98PJe-L7vIXRLMyaoig0RbjsQxq0iCY8yYhIdWy1tyAVwh5-HcX_CnqbtaQN1N1wYgFXWub_K6T5b12-C2pvBMs-D1zCKE-HJn5ErYxiQ-BjjsMvvv7dhHn78KRgTsK6JMxXGa16WoFlJ_bhbBhNzfk-krVOmd4gO6vIQd6o_OEINUxyj_S3RwBO0dpHFc8DRVdqvXytzhxdLfyeNZZHhmSxxCbj0YoaXcNe-AtFUvLBY5Z_Sldh4nI9o8F6McKXjXOK8wJCivZF0mVcCSR2DbFWtuXyKJr2HcbdP6tkJxNCWWBOmTcRD2Va-obFSK6YTEUUgsSVk5tpP4aKXJFLQzBqaha4UsC1JlRSJ1iyOztBOsSjMOcIi5JIy4z643olxnfDQMFc4ZZnUVit6gdobp6V_Qpe6rJxuUGQfKTg7BWenlbMv_7nuCu1RAJb4e5BrtON8bW5cZbBWTR_6JtrtPA76Q3gOXt4GP_0svJg
linkProvider Elsevier
linkToHtml http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV07T8MwELZKOwAD4ineeGAkSuM4iT1WFVVKXwOtVLFEjuNUQTStmvL_8TkuKitrYkvWnfX57vTddwg9k4wykobKYfo6ODTKU4dHfuYoLsNcityLGPQOj8ZhPKNv82DeQN1dLwzQKi3215hu0Np-ca013XVRuO-eH3Jmmj99HcZQfoBaoE4VNFGr0x_E4z2mh5mACusd2GB7Z2qa17KqQLaSmIm3FIbm_D5Kew9N7xSd2AgRd-pDnKGGKs_R8Z5u4AXaaufiJVDpavnX7416wau1KUtjUWZ4ISpcATW9XOA1lNs3oJuKVzlOiy-ho2w8LSbE_SgnuJZyrnBRYkBps0ho8BXQp45BucrKLl-iWe912o0dOz7BUaTNtg6Vyo88EaQmp8mFTKnkzPdBZYuJTGegTDuQc8FIliuSeToayNuCpIJxKWnoX6FmuSrVNcLMiwShSv_Q6RONJI88RXXslGVC5jIlNyjYGS35471EA3OyI5J9JmDsBIyd1Ma-_ee-J3QYT0fDZNgfD-7QEQGeiSmL3KOmtrt60IHCNn20F-EHnWe9pg
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=The+microstructure%2C+optical+and+gas+sensing+properties+of+bilayer+TiO2%2FZnO+systems+in+terms+of+annealing+temperature&rft.jtitle=Materials+science+in+semiconductor+processing&rft.au=Kheiri%2C+Fariba&rft.au=Soleimanian%2C+Vishtasb&rft.au=Ghasemi%2C+Mohsen&rft.au=Mokhtari%2C+Ali&rft.date=2021-01-01&rft.pub=Elsevier+Ltd&rft.issn=1369-8001&rft.eissn=1873-4081&rft.volume=121&rft_id=info:doi/10.1016%2Fj.mssp.2020.105462&rft.externalDocID=S1369800120313949
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1369-8001&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1369-8001&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1369-8001&client=summon