基于氮化镓的导模共振滤波器仿真分析

根据严格耦合波理论和等效介质理论,提出了针对C波段、基于半导体材料氮化镓的亚波长导模共振滤波器结构及设计方法。详细探讨了在强调制光栅的高占空比作用下,光栅周期和入射波角度对滤波器反射谱共振波长的影响。在保持滤波效果为高衍射率（共振波长峰值反射率达到99.5%以上）、低旁带和窄线宽的条件下,利用其对入射波角度的敏感性,结合仿真数值提出了一种通过MEMS（微机电系统）平面反射镜调谐入射角角度（04.07°）,从而线性地控制共振波长输出（调谐范围为36nm）,实现峰值半宽高低于0.8nm的C波段可调滤波器。...

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Published inGuangtongxin Yanjiu pp. 55 - 58
Main Authors 赵昊, 诸波, 胡芳仁, 魏润润
Format Journal Article
LanguageChinese
Published 《光通信研究》编辑部 01.01.2014
Subjects
导模共振;氮化镓;滤波器;微机电系统
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Abstract 根据严格耦合波理论和等效介质理论,提出了针对C波段、基于半导体材料氮化镓的亚波长导模共振滤波器结构及设计方法。详细探讨了在强调制光栅的高占空比作用下,光栅周期和入射波角度对滤波器反射谱共振波长的影响。在保持滤波效果为高衍射率（共振波长峰值反射率达到99.5%以上）、低旁带和窄线宽的条件下,利用其对入射波角度的敏感性,结合仿真数值提出了一种通过MEMS（微机电系统）平面反射镜调谐入射角角度（04.07°）,从而线性地控制共振波长输出（调谐范围为36nm）,实现峰值半宽高低于0.8nm的C波段可调滤波器。
AbstractList 根据严格耦合波理论和等效介质理论,提出了针对C波段、基于半导体材料氮化镓的亚波长导模共振滤波器结构及设计方法。详细探讨了在强调制光栅的高占空比作用下,光栅周期和入射波角度对滤波器反射谱共振波长的影响。在保持滤波效果为高衍射率（共振波长峰值反射率达到99.5%以上）、低旁带和窄线宽的条件下,利用其对入射波角度的敏感性,结合仿真数值提出了一种通过MEMS（微机电系统）平面反射镜调谐入射角角度（04.07°）,从而线性地控制共振波长输出（调谐范围为36nm）,实现峰值半宽高低于0.8nm的C波段可调滤波器。
Author 诸波
魏润润
赵昊
胡芳仁
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SubjectTerms 导模共振;氮化镓;滤波器;微机电系统
Title 基于氮化镓的导模共振滤波器仿真分析
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