Evaluation of SiO 2 Thin films on piezoelectric substrates using line-focus-beam ultrasonic material characterization system

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 58; no. SG; p. SGGA05
Main Authors Suenaga, Ryota, Suzuki, Masashi, Kakio, Shoji, Ohashi, Yuji, Arakawa, Mototaka, Kushibiki, Jun-ichi
Format Journal Article
LanguageEnglish
Published 01.07.2019
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ISSN:0021-4922
1347-4065
DOI:10.7567/1347-4065/ab14d4