Triblogical, Thermal, and Kinetic Attributes of 300 vs. 450 mm Chemical Mechanical Planarization Processes

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Bibliographic Details
Published inMeeting abstracts (Electrochemical Society) Vol. MA2012-02; no. 29; p. 2509
Main Authors Jiao, Yubo, Liao, Xiaoyan, Wu, Changhong, Zhuang, Yun, Theng, Siannie, Sampurno, Yasa, Goldstein, Michael, Philipossian, Ara
Format Journal Article
LanguageEnglish
Published 04.06.2012
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ISSN:2151-2043
2151-2035
DOI:10.1149/MA2012-02/29/2509