Novel Precursors for the MOCVD of Molybdenum Nitride

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Published inMeeting abstracts (Electrochemical Society) Vol. MA2009-02; no. 34; p. 2512
Main Authors Thiede, Tobias, Gwildies, Vanessa, Alsamann, Louay, Rische, Daniel, Fischer, Roland
Format Journal Article
LanguageEnglish
Published 20.07.2009
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Author Alsamann, Louay
Rische, Daniel
Thiede, Tobias
Fischer, Roland
Gwildies, Vanessa
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  fullname: Fischer, Roland
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Title Novel Precursors for the MOCVD of Molybdenum Nitride
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