Dual-Layer Silicon Nitride Cantilever Beam Optical MEMS Accelerometer
Saved in:
| Published in | Modeling and Simulation Vol. 14; no. 5; pp. 634 - 643 |
|---|---|
| Main Author | |
| Format | Journal Article |
| Language | English |
| Published |
2025
|
| Online Access | Get full text |
Cover
Loading…
| ISSN: | 2324-8696 2324-870X |
|---|---|
| DOI: | 10.12677/mos.2025.145421 |