Dual-Layer Silicon Nitride Cantilever Beam Optical MEMS Accelerometer

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Published inModeling and Simulation Vol. 14; no. 5; pp. 634 - 643
Main Author 陈, 欣
Format Journal Article
LanguageEnglish
Published 2025
Online AccessGet full text

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Author 陈, 欣
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Cites_doi 10.1038/s41378-019-0105-y
10.1364/oe.534552
10.1016/j.yofte.2021.102579
10.1364/oe.23.00a428
10.3390/s18092910
10.3390/s17112669
10.1029/2018gl080428
10.1364/optica.413117
10.1364/oe.445192
10.1038/s41598-024-80804-5
10.1109/transducers.2019.8808749
10.1063/1.4826545
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Title Dual-Layer Silicon Nitride Cantilever Beam Optical MEMS Accelerometer
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