Electrical and Optical Characterization of GeON Layers with high-k Gate Stacks on Germanium for Future MOSFETs
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Published in | Meeting abstracts (Electrochemical Society) Vol. MA2012-01; no. 16; p. 690 |
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Main Authors | , , , , , , |
Format | Journal Article |
Language | English |
Published |
15.02.2012
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Online Access | Get full text |
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Author | McNeill, David W. Murad, Shahjahan N. Armstrong, B.M. Montgomery, John H. Mitchell, S.J.N. Baine, Paul T. Modreanu, Mircea |
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Title | Electrical and Optical Characterization of GeON Layers with high-k Gate Stacks on Germanium for Future MOSFETs |
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